Used KARL SUSS / MICROTEC ACS 300 #9384559 for sale

KARL SUSS / MICROTEC ACS 300 is a photoresist equipment for the precision fabrication of microelectronic components. It leverages multiple-exposure and alignment capabilities to provide reliable, small-feature-size pattern transfer. The system consists of three components: the microstepping microprocessor-controlled XY substrate stage, the precision X-Y-Z stage, and the automated exposure/development unit. The substrate stage offers flexible movement increments and velocity settings for precise feature placement, while the economy X-Y-Z stage allows reliable optical penetration required for critical alignment. For patterning small structures of 30µm or better, MICROTEC ACS 300 features a sub-micron alignment capability using an integrated digital vision camera machine. KARL SUSS ACS 300 also provides a modular tool for metallization of substrates. The precision lift mechanism of its metallization module allows small-scale positioning of substrates over textured surfaces and protect sheets. The module also incorporates an automated micro-mask loading asset, chemical vapor-delivery model, and infrared-based heating equipment. The system can also be used for coating and etching processes. Metal oxide etching is handled through adjustable settings for etchant exposure times. Similarly, a wide range of coating processes and pre-conditions can be configured using automated programmable options. ACS 300 is designed to facilitate repeatability and process control. The integrated microprocessor controls provides access to calibration and verification modules, as well as unit maintenance records. Similarly, real-time process-control techniques help maintain consistent process results. KARL SUSS / MICROTEC ACS 300 is an advanced, automated photoresist machine. It provides reliable, small-feature-size pattern transfer and coating/etching capabilities. Its integrated microprocessor controls provide reliable process control and monitoring capabilities, while its calibration and verification modules offer automated feature measurement and tracking.