Used KARL SUSS / MICROTEC Delta 20T #9139667 for sale

KARL SUSS / MICROTEC Delta 20T
ID: 9139667
Wafer Size: 6"
Manual coat spinner, 6".
KARL SUSS / MICROTEC Delta 20T is a photoresist equipment that provides high resolution masking solutions optimized for both the traditional batch processing and advanced wafer-level packaging applications. MICROTEC Delta 20T incorporates multiple advanced process technologies that allow users to achieve micrometer accuracy in placing the features of any given sample. The system features an AC servo stepper motor with an ultrasonic blade positioning mechanism and a smooth belt transport. This allows for highly accurate exposure to the photoresist material. The unit also provides excellent uniformity of material coating. The wafers are loaded and unloaded quickly and easily through the front panel user interface. KARL SUSS Delta 20T's high resolution image projection machine offers superior uniformity coverage over the entire wafer surface. This is made possible by its precise lens calibration tool and high-resolution optical imaging projection techniques. Delta 20T also allows for precise correction and optimization of various photoplots, enabling users to accurately treat challenging substrates such as thin wafers and ITO substrates. KARL SUSS / MICROTEC Delta 20T also features a positioning accuracy of ±1 micrometer. This ensures that the masking pattern is correctly located on the wafer surface without deviation. Additionally, the asset also features an advanced sputtering chamber. This chamber enables the completion of Plasma Enhanced Chemical Vapor Deposition (PECVD) processes, which is necessary for producing high resolution thin-film patterns. MICROTEC Delta 20T is a state-of-the-art photoresist model that offers users a suite of cutting-edge process technologies for producing the most advanced microstructures in the shortest time. It is designed to help users optimize their production yields and reduce their fabrication costs.
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