Used KARL SUSS / MICROTEC Delta 36T #107379 for sale

ID: 107379
Wafer mask cleaner Currently warehoused 2004 vintage.
KARL SUSS / MICROTEC Delta 36T is a photoresist equipment that is used to produce high resolution submicron structures on substrates. This system is equipped with multiple exposure capabilities, allowing for the production of highly intricate patterns on semiconductor microchips. MICROTEC Delta 36T has an advanced optical unit for improved light uniformity across the substrate and the ability to work with a wide range of photoresist materials. KARL SUSS Delta 36T utilizes an advanced projection optical machine to provide superior lithographic accuracy, allowing for accurate and high yield production. The tool employs a Carl Zeiss f-Theta Lens that has a numerical aperture of 0.75, which provides a high resolution of down to 0.2 µm. Additionally, Delta 36T is designed to support up to four exposures in one cycle, allowing high aspect ratio and superior depth of focus contours. KARL SUSS / MICROTEC Delta 36T also features a powerful and intuitive software package that allows for easy alignment of the substrate and pattern on the substrate. The "Step & Repeat" feature of the software allows for the generation of multiple consistent images on multiple substrates, and the "Auto Align" feature makes fine adjustments to improve overlay accuracy. MICROTEC Delta 36T is also capable of generating binary as well as grayscale images. In terms of imaging accuracy and uniformity, KARL SUSS Delta 36T excels. It is equipped with ImageMASSter intelligent measurement software that helps ensure imaging accuracy and features an additional high resolution encoder that delivers improved driving accuracy. This asset is also equipped with programmable controlled process parameters for precision recipe management, and it has an easy to use touchscreen interface for greater convenience and efficiency. In terms of safety, Delta 36T is equipped with a host of Dust Shield and Vacuum Shields that protect the optics from dust or particles, both of which will affect the lithography output. The model is also equipped with a sophisticated proximal vision equipment that detects the presence of objects in the substrate plane, ensuring high levels of operator safety. In conclusion, KARL SUSS / MICROTEC Delta 36T photoresist system is a well designed and highly efficient unit that can produce high resolution submicron patterns with impressive lithography accuracy. This machine provides superior illumination and a powerful yet intuitive software suite to ensure repeatable and efficient results. Additionally, MICROTEC Delta 36T provides important safety features to protect the optics and operators.
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