Used KARL SUSS / MICROTEC Delta 36T #9298295 for sale

ID: 9298295
Vintage: 2005
Wafer mask cleaner 2005 vintage.
KARL SUSS / MICROTEC Delta 36T is a photoresist equipment designed specifically for use in MEMS development and production. Photoresist systems are used in microfabrication to create patterns on a substrate material such as silicon or glass. The process involves exposing a photosensitive polymer material to light in order to create a pattern on the substrate. MICROTEC Delta 36T photoresist system from MICROTEC is comprised of four essential components: an exposure unit, a super-clean photoresist handling station, a post-processing machine, and a platform to hold the substrate material. KARL SUSS Delta 36T exposure tool is an enclosed platform featuring 36 aerosol JetHeads to accurately control the dose of UV exposure. This highly precise, top-down irradiation aligns the substrate with the JetHeads for uniform illumination. Each JetHead is individually adjustable and the asset includes an integrated automatic wash model for cleaning. The cleanliness of the equipment is essential for the preservation of the photoresist materials and the quality of the patterns produced. Delta 36T super-clean photoresist handling station is a critical part of the system, ensuring that the photoresist materials are not contaminated during loading and unloading of the substrate. The station is designed to minimize particulate and chemical contamination and maintain the cleanliness of the unit. The post-processing machine is used after the irradiation is complete and consists of thermal annealing and either a wet or dry develop process. By providing this controlled environment, KARL SUSS / MICROTEC Delta 36T ensures that the patterns created are consistent and reliable. MICROTEC Delta 36T photoresist tool is a versatile, reliable tool that has proven reliability and repeatability on many types of MEMS substrates. Highly versatile and accurate, this asset is a perfect tool for any MEMS application or research. It features high resolution imaging and a safe, clean environment, making it ideal for creating patterns on microfabricated devices and components.
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