Used KARL SUSS / MICROTEC Delta 80 #293585694 for sale

KARL SUSS / MICROTEC Delta 80 is a photoresist equipment designed for single-to-triple layer photoresist processing. It utilizes a programmable, reliable, and robust platform that supports extremely precise and repeatable results. It is primarily used in the microelectronic and nanoelectronic industries. MICROTEC Delta 80 has a feature-rich control system that is mounted onto a stainless steel vacuum chamber. It allows a user to precisely control the photoresist's exposure parameters such as exposure angle, exposure time, and intensity. It also supports ultra-high-matching of resist layers between different substrates and stages. The unit provides a high quality surface finish and feature uniformity to ensure compatibility with the photoresist processing. The vacuum chamber utilizes a high pressure PPT coating technology for improved plasma cleaning and adhesion that eliminate precoating. KARL SUSS Delta 80 features a modular design that allows for flexible configuration to meet individual needs. The machine can be upgraded with additional modules, such as spin-coating technology and hard bake modules, allowing for customizations. The tool supports multiple materials, from resist to copper; from single layers to multiple-layer etching technology. It has repeatable accuracy of 0.03 um with wafer thickness of up to 300 um; and repeatable layer thickness of 0.001 nm with wafer size of up to 150 mm. It also can support multiple process steps in a single run, such as optical printing, coating development processes, and plasma treating. Delta 80 provides an unprecedented level of uniformity and easy to use, straightforward control. It also has one of the widest range of application profiles, offering optimal choices in photoresist processing with the highest quality and accuracy. It ensures repeatable process control and superior precision for high quality low cost processes.