Used KARL SUSS / MICROTEC Delta 80RC T #293586445 for sale
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ID: 293586445
Vintage: 2008
Coater system, 8"
Substrates size: 4" x 4"
(3) Objectives
CCD
Spinner module
Stainless steel cabinet
Gyrset cover coating
Operator panel with display
Polypropylene bowl
Full sensor waste bottle
Acceleration: 1 up to 5 rpm/s
Spinning Time: 0.1 up to 999s
Power supply: 400 VAC, 50/60 Hz
2008 vintage.
KARL SUSS / MICROTEC Delta 80RC T is an automated photoresist equipment primarily designed for sub-micron to macroscale imaging applications. Photoresist systems are mainly used in microelectronics and semiconductor industries for the purpose of creating circuits and chips. MICROTEC Delta 80RC T is a robust system that is used by customers worldwide as a reliable and convenient alternative to conventional analog methods of mask production. It is capable of producing high-resolution images with flexible features that enable complex patterns and designs to be easily replicated on a variety of devices. KARL SUSS Delta 80RC T has a computer-controlled platform that consists of a quartz-halogen light source, a computer-operated imaging unit, and a stage controls unit. The platform can be configured in either vertical or horizontal configurations, depending on the user's preference. Delta 80RC T can also be fitted with a wide range of imaging optics from MICROTEC family of image writing machine lenses. KARL SUSS / MICROTEC Delta 80RC T is highly automated and programmable, allowing for the use of custom imaging programming. The tool can control the exposure of the sample, including the dose and bake, in addition to other parameters such as temperature, vacuum and acceleration. MICROTEC Delta 80RC T also has a variety of safety features such as emergency shutoff, low-level and high-level alarms, and automatic shutdown in the event of thermal or other irregularities. KARL SUSS Delta 80RC T is specifically designed for precision patterning applications and offers an effective and efficient method of achieving reliable and repeatable results. Its high resolution and large field of view allow for the precise placement of features down to the 1µm level, while its high contrast and uniformity provide accurate results. Delta 80RC T is an ideal choice for those who need a reliable, accurate, and highly automated photoresistasset. It is renowned for its ease of use, fast process cycles, and robust engineering, and its flexibility allows for the production of complex patterns with superior results. Despite its high initial cost, KARL SUSS / MICROTEC Delta 80RC T offers cost savings in the long term by providing a lower cost per feature and lower process cost per wafer.
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