Used KARL SUSS / MICROTEC Delta 80T2 #293590415 for sale

KARL SUSS / MICROTEC Delta 80T2 is a photoresist equipment designed to enable a precise planarizing, etching, and imaging of thin films. It is a high-precision system suitable for production of high density integrated circuits (ICs), compound semiconductors, MEMS, optical systems, and micro-electromechanical (MEMS) device production. The unit features a state-of-the-art monitoring machine which utilizes high resolution cameras, strobe lights and a CCD detector to ensure precise control over the etching and imaging processes. It also features a high speed loading tool with up to 160 wafers per cycle, a 12-axis horizontal motion asset and a multi-aperture optical model. MICROTEC Delta 80T2 utilizes a high-power xenon lamp with a gentle warm up cycle and a precise clutch engagement, as well as an advanced recipe controller unit with precise timing as well as advanced features such as automatic background shutter, in-situ film measurement, and XY-axis fine adjustment for precise CD-SEM back-etch control. It has a wide range of automatic process control capabilities, from automatic exposure controls and CD to CD control, to image enhancement control, a suite of in-situ CD-SEM monitoring tools, and a temperature controlled sample handling equipment. It also contains a range of safety features including, but not limited to, a wet bench security switch, and a comprehensive etching plume control system. KARL SUSS Delta 80T2 is a versatile photoresist unit capable of achieving high resolution images and high process consistency due to its precise controls and high accuracy. Its superior etch performance reduces process overhead costs and wafer yield losses to a minimum. With its built-in fault protection systems, it can produce a wide range of nanometer-scale feature sizes and pitch densities suitable for various applications.