Used KARL SUSS / MICROTEC Delta 80T2 #9190377 for sale

ID: 9190377
Vintage: 2005
Manual spin coater 2005 vintage.
KARL SUSS / MICROTEC Delta 80T2 is a photoresist equipment designed for optical lithography applications. It is a high-end, laser-interferometer-based, optical photolithography system that is capable of producing feature sizes down to 0.8 microns. The unit is designed to apply a high-resolution imaging tool to a wide variety of applications ranging from semiconductors, displays, and advanced packaging to microelectronic packaging. It consists of an imaging head, an automated stage, and a sophisticated software package and hardware for controlling and optimizing the exposure process. The imaging head serves as the main interface to the user and consists of a continuous wave UV laser optically coupled to a transmissive X/Y scanning stage. The laser-interferometer-based machine is capable of positioning a mask or wafer accurately and repeatedly to within 2 microns over several hundred mm. The tool can also dynamically adjust the stage positions in order to optimize the imaging process. The automated stage is a highly accurate, motorized stage, with resolution down to 0.2 microns. It is capable of in-situ heating and cooling, and provides a level of accuracy that exceeds that offered by humans. The stage includes a robust and flexible drive mechanism, for the optically-addressed X/Y scanning stage. MICROTEC Delta 80T2 is equipped with an advanced software package, which allows users to control the exposure process and optimize the image quality. The software includes prescriptions for both traditional and advanced photolithography applications, and provides a wide range of exposure parameter settings. In addition, the user can access a large library of recipes and customizable recipes for specialized process applications. KARL SUSS Delta 80T2 is capable of processing different exposure levels and exposure times depending on the particular application. It provides a number of tools for measuring, monitoring, and measuring the process parameters while the asset is running. It is also capable of data logging and reporting, for the purpose of analyzing the results of a particular process. In summary, Delta 80T2 is a high-end model designed for optical lithography applications. It offers a high level of accuracy down to 0.2 microns, and is capable of running both traditional and advanced photolithography applications. Its reliable drive systems and advanced software package ensures that users can get the most out of their processes.
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