Used KARL SUSS / MICROTEC Gamma 60 #293828179 for sale
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ID: 293828179
Wafer Size: 4"-6"
Automatic coater system, 4"-6"
Robot type: GENMARK 4S0401013
(2) IO Ports
(2) Hot plates
Cool plate
HMDS Module
(3) Bellow pumps
Spin coating station
Developer station.
KARL SUSS / MICROTEC Gamma 60 photoresist equipment interfaces with any standard semiconductor process line and enables the production of complex microstructures with micron-level accuracy and resolution. The system features a compact, modular design and integrates the world's most advanced electron beam patterning and resist processing technologies. This enables unparalleled pattern quality and critical feature control, achieving the highest uniformity and most accurate overlay alignment. MICROTEC Gamma 60 employs a large area stage, providing a large area exposure field making it ideal for large chip production. Additionally, the integrated design allows for full remote operation of the unit and ensures maximum operator safety. The machine provides excellent resolution for chip patterning and features a high speed beam blanker for reduced exposure time. Additionally, it offers superior focus accuracy and in-field depth correction, allowing for the manufacturing of multiple layers with desired depths. KARL SUSS Gamma 60 utilizes a high contrast programmer to ensure the most accurate feature resolution and critical dimension (CD) control. It also has a wide range of process parameters such as exposure dose and focus which can be remotely adjusted, providing easy and reliable process optimization. The tool has an intuitive user interface that makes it easy to guide the electron beam and control the process parameters for optimal results. Gamma 60 also has an advanced optical asset which provides direct visual inspection of the wafer for real-time defect detection. KARL SUSS / MICROTEC Gamma 60 generates incredibly stable and reproducible images, making it ideal for repetitive production environments. Moreover, the model is backed by comprehensive documentation and technical support, ensuring the highest performance and reliability.
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