Used KARL SUSS / MICROTEC Gamma DSSP #9232865 for sale
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ID: 9232865
Vintage: 2013
Coater / Developer system
4M
Quantity / Part number / Description
(1) / V700041 / SUSS Gamma microlithography cluster 4M
(1) / 100005154 / SUSS Gamma frame extension 2S
(1) / 100005155 / SUSS Gamma adjustable air flow cover 4M
(1) / 100009611 / Safety interlock for all doors on the system
(1) / 100005513 / Auto carrier ID dialog
(1) / V700032 / Bar code reader for sequence selection
(1) / 100009610 / Single end effector robot (SR8230)
(1) / V711021 / Optical cassette scanner
(1) / 100001254 / Special stacked (4) I/O gamma
(1) / Q11986-08 / Carrier-LEDs for (2) carriers
(1) / 100010113 / Rotational pre-aligner
(1) / Q200286-01 / Special fork type vacuum end effector R4-R6 for robot with minimized heat transfer
(2) / V709001 / SUSS Topography coater alta sprays
(2) / - / Special substrate assembly R6 alta sprays BSR
(2) / V734510 / Resist spray dispense system up to 30cP with filter and reservoirs
(2) / V723000 / Resist bottle holders
(2) / V723010 / Resist bottle adapters
(2) / V734520 / Pre wet dispense nozzle alta sprays
(2) / V734540 / BSR Dispense option alta sprays, 50ml
(2) / V734545 / Additional chuck vacuum lines
(2) / V745120 / Filter unit solvents
(1) / V736101 / Aqueous process module
(1) / V736111 / Programmable dispense arm AQ
(1) / V736135 / Substrate assembly R4-R6 AQ
(1) / V736300 / Puddle dispense system AQ
(1) / V736320 / Fan spray dispense system AQ
(1) / Q736320 / Fan spray dispense system AQ for 3rd line
(1) / V736340 / Topside rinse dispense AQ
(6) / V736390 / Flow detection sensors AQ
(1) / V745100 / Filter unit DI-water
(1) / V745110 / Filter unit AQ developer
(1) / V738030 / Nitrogen drying option
(1) / V740010 / Hot / Cool plate / Vacuum prime stack module
(2) / V744110 / Hot plate cassette 250° C proximities
(2) / V744230 / Cool plate cassette proximities
(1) / V744300 / Vacuum primer
(1) / 100000699 / Substrate assembly vacuum primer R2-R8
(1) / V744340 / Pressure tank system (5L Stainless steel / HMDS) / Bubbler
(1) / V744350 / Safety package HMDS
(1) / V826020 / JULABO FL601 TCU (50 Hz)
(3) / V760011 / Media storage stainless steels
(1) / V760120 / Pressure tank system (10L stainless steel bulk fill)
(2) / 100005184 / Pressure tank systems (5L PE bulk fill) KALREZ
(1) / V760240 / Waste canister (20L stainless steel) quick
(1) / V772005 / Additional gas monitor
2013 vintage.
KARL SUSS / MICROTEC Gamma DSSP is a high-precision photoresist equipment that is used widely across the semiconductor industry for manufacturing microchips. The system uses a high-power UV light source combined with a sophisticated optics that allows the production of precise patterns on a range of photoresist materials. At the core of the unit is the gamma light source which is based around a 1200-watt Xenon arc lamp. This allows the machine to generate a highly focused column of UV light that is adjustable in both power and exposure time. The light beam is shaped and collimated by a set of lenses and mirrors and then directed to the substrate. At the core of the tool is the CCD positioner which allows for precise and repeatable alignment of the substrate relative to the light source. This ensures that the exact amount of light is delivered at exactly the right position on the surface. The CCD positioner is also able to detect the presence of the substrate and make the necessary adjustments to focus the light correctly. As well as the high-power light source and optics the asset also includes a set of precision control electronics. This allows the light source and optics to be fine-tuned to ensure that the best possible exposure of the photoresist is achieved. The precise control of the light exposure ensures that minute details can be accurately transferred onto the photoresist. MICROTEC Gamma DSSP photoresist model is capable of producing highly accurate patterns on both single and double layer photoresists. It is widely used across the semiconductor industry for the production of a wide variety of integrated circuits and microchips. With its combination of sophisticated optics, precise control electronics and a high-power light source, KARL SUSS Gamma DSSP is able to produce patterns with a very high level of detail and accuracy.
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