Used KARL SUSS / MICROTEC Gamma DSSP #9232866 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9232866
Vintage: 2013
Coater / Developer system
4M
Quantity / Part number / Description
(1) / V700041 / SUSS Gamma microlithography cluster 4M
(1) / 100005154 / SUSS Gamma frame extension 2S
(1) / 100005155 / SUSS Gamma adjustable air flow cover 4M
(1) / 100009611 / Safety interlock for all doors on the system
(1) / 100005513 / Auto carrier ID dialog
(1) / V700032 / Bar code reader for sequence selection
(1) / 100009610 / Single end effector robot (SR8230)
(1) / V711021 / Optical cassette scanner
(1) / 100001254 / Special stacked (4) I/O gamma
(1) / Q11986-08 / Carrier-LEDs for (2) carriers
(1) / 100010113 / Rotational pre-aligner
(1) / Q200286-01 / Special fork type vacuum end effector R4-R6 for robot with minimized heat transfer
(2) / V709001 / SUSS Topography coater alta sprays
(2) / 100006861 / Special substrate assembly R4 alta sprays BSR
(2) / - / Special substrate assembly R6 alta sprays BSR
(2) / V734510 / Resist spray dispense system up to 30cP with filter and reservoirs
(2) / V723000 / Resist bottle holders
(2) / V723010 / Resist bottle adapters
(2) / V734520 / Pre wet dispense nozzle alta sprays
(2) / V734540 / BSR Dispense option alta sprays, 50ml
(2) / V734545 / Additional chuck vacuum lines
(2) / V745120 / Filter unit solvents
(1) / V736101 / Aqueous process module
(1) / V736111 / Programmable dispense arm AQ
(1) / V736135 / Substrate assembly R4-R6 AQ
(1) / V736300 / Puddle dispense system AQ
(1) / V736320 / Fan spray dispense system AQ
(1) / Q736320 / Fan spray dispense system AQ for 3rd line
(1) / V736340 / Topside rinse dispense AQ
(6) / V736390 / Flow detection sensors AQ
(1) / V745100 / Filter unit DI-water
(1) / V745110 / Filter unit AQ developer
(1) / V738030 / Nitrogen drying option
(1) / V740010 / Hot / Cool plate / Vacuum prime stack module
(2) / V744110 / Hot plate cassette 250° C proximities
(2) / V744230 / Cool plate cassette proximities
(1) / V744300 / Vacuum primer
(1) / 100000699 / Substrate assembly vacuum primer R2-R8
(1) / V744340 / Pressure tank system (5L Stainless steel / HMDS) / Bubbler
(1) / V744350 / Safety package HMDS
(1) / V826020 / JULABO FL601 TCU, 50 Hz
(3) / V760011 / Media storage stainless steels
(1) / V760120 / Pressure tank system (10L stainless steel bulk fill)
(2) / 100005184 / Pressure tank systems (5L PE bulk fill) KALREZ
(1) / V760240 / Waste canister (20L Stainless steel) quick
(1) / V772005 / Additional gas monitor
2013 vintage.
KARL SUSS / MICROTEC Gamma DSSP is a photoresist equipment designed for microfabrication. It combines both optical and electrical techniques to ensure the precise deposition of a resist layer onto substrate surfaces. The system is comprised of a vacuum deposition chamber, a vacuum manipulator, a syringe unit, and a pattern mask. The deposition chamber houses a high-precision, pneumatically-operated platform that can move in three dimensions. This platform allows for repeatable wafer placement in close proximity to the mask. The depositing material, typically an advanced photoresist formulation such as a photoresist polymer, is pumped through a syringe machine. The syringe tool can be tailored for precise control over the flow rate, dosage, and patterning of the photoresist material. The asset also incorporates a pattern mask, typically made of quartz or metal, which is attached to the deposition chamber. The mask is used to limit the exposure of the deposited photoresist material to certain areas. The pattern of the mask is produced by lithography. The integrated laser exposure model then provides ultraviolet light to enhance the activation of the exposed areas. A range of voltage settings is available for the equipment, allowing for the customisation of deposition times and the precise control of the resist layer quality. The resist layer is 'baked' at a user-selectable temperature to create physical, chemical, or electrical bonds between the layers. The system also features pneumatic control of the vacuum chamber for ultimate precision and repeatability of the entire process. MICROTEC Gamma DSSP is an advanced photoresist unit with the capability to deposit extremely thin, uniform, complex layers onto substrate surfaces. It combines high-precision, tailored syringe systems with sophisticated patterning techniques from lithography to ensure precise, repeatable results. It is a versatile machine that offers users complete control over the deposition process for a wide range of microfabrication applications.
There are no reviews yet