Used KARL SUSS / MICROTEC Gamma #293585692 for sale
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ID: 293585692
Wafer Size: 4"-6"
Vintage: 2009
Developer systems, 4"-6"
2009 vintage.
KARL SUSS / MICROTEC Gamma is a photoresist equipment which combines high-end performance and flexibility to enable the production of complex and delicate patterns for a variety of microfabrication applications. This system is geared towards the development of two-dimensional and three-dimensional structures, with surface roughness down to three nanometers, which are essential for device miniaturization. The unit features an extremely high-precision 8-axis movement stage coupled with a variable angle bar, which allows for the processing of multiple materials. It also offers a full range of background illumination settings, allowing for processing with uv, e-beam, i-line and kr+ wavelengths. The machine's resolution and accuracy also allow for high definition lithography applications, such as photomask fabrication, circuit and component repairs, surface-mount components, MEMS and NEMs device production, etching and polymer nanofabrication. MICROTEC Gamma also offers a number of advanced technologies. Its integrated 3D scanning software enables the alignment of complex three-dimensional images in the X, Y and Z axes. It also offers a configurable multi-layer feature, which allows for the integration of multiple lithography steps into a single process. This eliminates the need for individual alignment and positioning. In addition, KARL SUSS Gamma also features an integrated process control tool, which allows for the real-time optimization of processes across a range of parameters. This includes exposure dose, post-exposure processes and oven temperature. The asset's hardware and software is also easily upgradable and customisable to adjust to changing patterns, allowing for fabrication of structures with superior surface quality, line edge roughness and fine features. Gamma model offers many advantages to the manufacturing process, from increased productivity and improved product quality, to cost savings through its user-friendly ID integration and easy-to-use software. With its state-of-the-art designs and cutting-edge technology, KARL SUSS / MICROTEC Gamma can help meet the needs of the most demanding microfabrication applications.
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