Used KARL SUSS / MICROTEC Gamma #293605208 for sale
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ID: 293605208
Vintage: 2015
Spin coater
Back side cleaning
(2) Spray coaters
(2) HMDS Chambers
(2) Cool plates
No hotplate
2015 vintage.
KARL SUSS / MICROTEC Gamma is a photoresist equipment, a computer-managed device used in microfabrication and semiconductor manufacturing. The device is applicable in a variety of processes, including high-end lithography and photolithography as well as quality control and wafer verification. This system utilizes a high-resolution optics unit and various process, vacuum, and safety features to provide excellent results. It is specifically designed for cost-efficiency, reliability and repeatability, making it ideal for the production of micro- and nanostructures. MICROTEC Gamma machine is comprised of two units: the main processor and the frame unit. The main processor enables the programming, control, and operation of the tool. It includes a touch-sensitive LCD display and a USB port, and is also equipped with a shuttle array of twenty removable fiducial plates for use in the microlithography process. The frame unit features a high-resolution optics asset, which can perform a range of photolithography processes with high accuracy. These include photolithography, mask alignment, metrology, and etch based patterning. The optical components have a maximum resolution of 0.23 microns. Additionally, this unit also features a vacuum chamber, pressure sensors, and a safety lock model to protect users from unnecessary exposure to light or vibration. The equipment also has a software library which provides commands for running and managing the system, and a plug-in structure enabling the use of additional software components. The unit has a built-in mask reader module which allows the user to transfer design data over the USB device for further processing. KARL SUSS Gamma photoresist machine is a reliable and cost-effective tool which provides excellent accuracy and repeatability. Its advanced features, such as the high resolution optics, vacuum chamber, safety lock, and built-in software library, provide users with the information and control necessary for efficient, successful lithography and microfabrication.
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