Used KARL SUSS / MICROTEC Gamma #293605209 for sale
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ID: 293605209
Vintage: 2012
Spin coater
Developer module
(2) Spray coater modules
(2) HMDS Chambers
(2) Cool plates
Hotplate
Does not include spin coater module
2012 vintage.
KARL SUSS / MICROTEC Gamma is a photoresist equipment designed for supporting advanced microfabrication, lithography, and optical applications. It consists of a variety of components, such as a UV-radiation source, an optical table, and a precision positioning system, which provide an environment suited to micro- and nano-structures production. The UV light source has a finely-adjustable power intensity and wavelength with a spectral range from 100nm to 500nm. It delivers up to 350mW/cm2 for reducing the exposure time and obtaining higher resolution patterns. This source is suitable for both resistive and non-resistive photolithographic materials, allowing for a wide range of application possibilities. The optical table consists of an aluminum or steel structure with a large surface, laser-cut to a flatness of less than 1µm allowing for extremely accurate positioning of the optical components during photolithographic operations. It mounts on an adjustable steel base supporting up to 200kg, thus providing improved stability during exposure times. The precision positioning unit is made up of two high-precision micrometerheads, each with a motion range of 5mm. By controlling the motion of each micrometerhead independently, a variety of micro- and nano-structures with highly precise positioning can be achieved. MICROTEC Gamma also includes a variety of additional accessories to facilitate the production processes. These include a baseplate and a frame for attaching the photomask, a stage for aligning the substrate and the mask, a vacuum chuck, and a movable stage for search mode. Overall, KARL SUSS Gamma certainly provides an environment well-suited for producing micro- and nano-structures with precision down to the nanometer level. Its optically-stable techniques, fast exposure times, and a variety of accessories make this a machine suitable for advanced photolithography applications.
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