Used KARL SUSS / MICROTEC Gamma #293745413 for sale
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KARL SUSS / MICROTEC Gamma is one of the leading photoresist systems in the field of nanofabrication. The equipment is a commercial mask aligner which can be used for the photolithography of customized microdevices or structures. It is developed by the company MICROTEC AG, and is one of the most widely used photoresist systems. MICROTEC Gamma has several features which make it a highly effective piece of equipment. It has a resolution of 0.5 um and offers a long working distance to accommodate a wider variety of device structures. The system features a state-of-the art high performance X-Y-Theta stage with a contact bar for accurate alignment of the mask and wafer. In addition, the unit includes a large autofocus motor and an exposure control to provide precise control of the exposure duration. An integrated stepper motor enables the adjustment of the alignment of the mask and wafer with manual or automatic indexing. KARL SUSS Gamma is also equipped with a high-speed wafer transfer machine which is capable of loading and unloading up to nine wafers simultaneously. This feature greatly reduces setup time when running multiple wafers with the same process. Additionally, the tool has an automated filter changer so that various wavelengths of light can be quickly adjusted for different photoresist formulations. One of the most remarkable aspects of the asset is its automated wafer handling capabilities. The model has a conveyor equipment which transports wafers from the load/unload station to the masks, and then back into the respective wafer cassettes. This eliminates the need to manually load and unload wafers during the lithography process. Gamma is an excellent choice for those interested in creating nanostructures for a wide range of device applications. It provides unmatched accuracy and speed and is incredibly user friendly for both experienced and novice users. This system is an invaluable tool which enables the realization of microscale features and structures for a variety of applications.
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