Used KARL SUSS / MICROTEC Gamma #293798807 for sale

KARL SUSS / MICROTEC Gamma is a photoresist equipment designed for microfabrication and nanofabrication processes. This system uses projection lithography techniques to transfer a pattern from a mask to a substrate. It can be used to develop photoresist patterns with dimensional accuracy at the micron and nanometer scale. The unit is equipped with ultraviolet (UV) light sources and optics for illumination. This includes a 198 nm excimer laser, a 157 nm fluorine laser, and a set of variable numerical apertures (NA). It can also use g-line (436 nm), i-line (365 nm), and deep-UV (248 nm) radiation or combinations of light wavelengths to broaden the exposure spectrum. The machine is designed with advanced exposure and patterning capabilities, including an automated wafer aligner, alignment markers, a precise movement tool, a full-field programmable intensity modulation, auto-focus and auto-refresh features, and a repositioning stage. It also allows for exposure translations (shifts) and high-resolution imaging of the patterned photoresist areas. MICROTEC Gamma is built in a standard bench-top format and offers convenient wet processing of photoresist materials with a heated spinning disk. In addition, the asset can easily integrate into a vacuum-based clean planar dry processing environment in order to create multiple layer structures and Nanoimprint processes. KARL SUSS Gamma delivers throughput and stability for high-accuracy patterning for the most demanding projects in the micro and nanotechnology fields, allowing for the development of features with dimensions of a few nanometers up to several micrometers. This ensures that the manufactured components will be precise and have properties suitable for a wide variety of technologies, such as MEMS, sensors, optoelectronic and biomedical devices. In addition, the model has a waste collection equipment, a network connection, and a protective glass window in the vacuum chamber. Finally, a powerful user-friendly software, Suss MICROTEC Premiere™, allows the user to quickly and easily create masks, import data, and automatically log details of each exposure.