Used KARL SUSS / MICROTEC Gamma #9314869 for sale

KARL SUSS / MICROTEC Gamma
ID: 9314869
Systems.
KARL SUSS / MICROTEC Gamma is a photoresist equipment designed for use in the fabrication of microelectronic and optoelectronic components. The system is an automated, multi-functional tool for lithography and provides precise, repeatable results. It is suitable for processing of flat substrates with a maximum size of 150 mm and a minimum feature size of 0.2 μm. The unit integrates several technologies such as a resist coater and developer, a stepper / scanner, a laser interferometer, and an image and pattern generator. The components of the machine can work together for a variety of applications, including ultra-thin film techniques. The tool also offers a variety of lithography capabilities including gray scale, binary, contact, proximity, and step-and-repeat exposure schemes. The stepper / scanner is capable of handling lens-to-photomask distances from 0.5 to 24 mm with alignment accuracy of a few nanometers. The asset can generate high-resolution patterns with a resolution up to 0.5000 μm and an accuracy of 0.2 μm. The model provides precise control of resist coating thickness, exposure intensity and duration, and development time and condition. The integrated MST metrology equipment uses a laser interferometer to inspect structures exposed on the designed substrate. This helps to ensure repeatable results with minimum down time and helps to avoid excessive rework due to misalignment or unexpected irregularities. The system also features an integrated software package for job management, multi-user control, process automation, and data analysis. This software helps users to create, manage, and store patterns quickly and easily, and to minimize the time to development. In addition, the unit offers an enhanced high-accuracy image generator for exposure of a variety of patterns types with improved resolution and accuracy. In conclusion, MICROTEC Gamma is an automated and modular photoresist machine offering precise, repeatable results for the fabrication of microelectronic and optoelectronic components. It integrates a range of technologies and features to provide consistent results with minimal down time. It is suitable for high resolution, high accuracy applications, and offers an integrated software package for job management, multi-user control, and process automation.
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