Used KARL SUSS / MICROTEC Gamma #9382257 for sale
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ID: 9382257
Vintage: 2005
Developer fully automatic cluster system
With (2) Media boxes
Power supply: 400 V, 60 Hz, 640 A, 3-Phase
2005 vintage.
KARL SUSS / MICROTEC Gamma photoresist equipment is an automated machine designed for photoresist processing and fabrication of planar microelectronic circuits and devices. It works by depositing photoresist material on a substrate, such as a wafer, followed by exposure of the photoresist to a pattern of light. The pattern is read by the machine and then used to selectively etch away the photoresist in order to create a patterned wafer. The machine features a rotating, variable speed spin chuck that allows uniform spinning and rotation of a substrate. It has a 6-axis X-Y-Z motion stage with optical alignment capability. The stage is capable of holding up to 4" (10.16 cm) diameter wafers and substrates, and has a vacuum-controlled surface that ensures perfect alignment with the print bed. For efficient and accurate exposure of substrates, the machine is equipped with a precision alignment system. The photoresist unit is also capable of performing liftoff processing, including peel-off applications and spray coating. Liftoff processing is done in a single step, by exposing and processing a photo-mask with a wafer, which is washed and treated in a solvent bath. This eliminates any rework and ensures efficient, high-quality device fabrication. The machine's high-resolution possibilities and ability to create small features even on the smallest of wafers is an added advantage. The photoresist machine is highly versatile and can be used to fabricate a variety of microelectronic components and devices, including capacitors, resistors, diodes, transistors, as well as many other components. In addition, it can be used to create microelectronic structures, such as filters, bridges, and multiplexers, among others. MICROTEC Gamma photoresist tool is designed with user-friendly controls and offers several user-friendly features such as auto-focus and a color LCD touchscreen display that provides operational guidance and real-time display of substrate processing. It also includes safety features such as a self-diagnostic asset that alerts operators to any glitches or model malfunction. The photoresist equipment is also highly adaptable to any laboratory settings and offers superior device fabrication results.
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