Used KARL SUSS / MICROTEC M 2000E #9316057 for sale
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ID: 9316057
Developer system
Type: 3-Track positive developer
Electronic cabinet
Temperature control cabinet
Operation manual
Technical documentation
2001 vintage.
KARL SUSS / MICROTEC M 2000E is a photoresist equipment that is used to create submicron structures. The system is comprised of three main components: a tweezer liquid dispenser, a spincoater and a digital imaging unit (Monocrhomatic, Color, UV, Fluorescence, and IR). The tweezer liquid dispenser is used to dispense and pattern the photoresist to the substrate. The spincoater is used to evenly distribute the photoresist on the surface of the substrate and to direct the photoresist into its proper shape. The digital imaging machine provides resolution far superior to non-photoresist systems and allows for a wide range of resolution and inspection options. MICROTEC M 2000E offers the capability to produce feature sizes smaller than 0.2 µm, which can be further adjusted depending on application requirements. It offers various illumination options such as monochromatic light, color light, ultra-violet (UV) light, fluorescent illumination, and infrared imaging. Aside from its various illumination options, KARL SUSS M 2000E also offers a wide variety of photoresists, such as positive photo-resist, negative photo-resist, remover-type, and multiple-exposed photo-resist. Furthermore, this tool has the capability to generate high throughput batches at production rates of up to 1,000 wafers per hour. This helps improve production cycles and reduce costs of the fabrication process. Additionally, its compatible with wafer sizes ranging from 2 to 12 inches, and features a fully automated wafer handling asset for stress-free operation. Apart from its ability to create submicron structures, M 2000E offers unparalleled precision and accuracy with its automated focus and focus offset functions. It also includes a fast addressing wafer mapping model that helps to ensure accurate and repeatable production of small features you can be proud of. Finally, KARL SUSS / MICROTEC M 2000E photoresist equipment provides a powerful combination of precision, accuracy, throughput, and cost-effectiveness.
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