Used KARL SUSS / MICROTEC RC 8 #9394308 for sale
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ID: 9394308
Wafer Size: 6"
Vintage: 2000
Spin coater, 6"
Maximum rotation speed: 7000 RPM
Minimum step: 10 RPM
Maximum acceleration: 5000 RPM/s
Time range: 0-999 Sec
2000 vintage.
KARL SUSS / MICROTEC RC 8 is an automatic photoresist equipment designed for advanced micro-structuring and micro-lithography. It utilizes an aligner and an exposure head to achieve very precise results in the patterning of micro-structure. MICROTEC RC 8 has a two-step process of the spinning of the resist and soft exposure. The spinning of the resist ensures uniform thickness and is followed by a soft exposure which controls the intensity and exposure time of the exposure head. KARL SUSS RC 8 aligner has a height adjustable stage and a rotation speeds up to 3000 rpm for spinning the photoresist film. It also features laser diode alignment, auto-alignment of the phototool, a resist/bake/strip controller and a visually guided system to ensure precise alignment and transfer of the pattern onto the substrate. The exposure unit contains an exposure head with an exposure time range of 0.03 to 2.75 seconds and an illumination power of 10 W/cm2. It also has a collimator lens to ensure uniform exposure of the photoresists film. The machine also features carbide rods for accurate and repeatable linear motion and a vacuum chuck to secure the photoresist film during exposure. The tool also has a resist pre-bake function to prepare the film for exposure. The bake chamber holds three sample holders for pre-bake temperatures of up to 175°C. The strip /stripper chamber hold six wafer carriers for stripping and cleaning the resist from the sample surface. This asset is also capable of automatic wafer loading and unloading and manage resist shots up to 6". RC 8 can process a variety of substrates such as silicon, glass, metals, and plastics. It can also be used for the fabrication of ultra-thin layers of materials such as gold, copper, aluminum, titanium, and chromium. This model is widely used for the manufacturing of quality electronic devices, optical films, and biomedical applications. This is an automatic equipment designed for high performance and advanced applications in micro-structuring.
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