Used LEYBOLD APS 1104 #293618526 for sale

LEYBOLD APS 1104 is a photoresist equipment designed for high precision mask making, inspection and metrology. It is an automated process system incorporating an advanced production control unit (APS) and a leading-edge photoresist platform. APS 1104 enables customers to execute the process of production and metrology of reticles and masks using advanced precision photoresist technology. The process involves the spinning, post-exposure baking, cooling, and development of photoresist to create a patterned resist for subsequent photolithography. The design and control of the entire photoresist process can be done in a single workflow on the same APS platform. The machine utilizes the latest in photoresist technology such as two-step reticle tiling, non-contact/contact control, multiple wavelength metrology and imaging, and barcode tracking. It is designed with an intuitive user interface which enables customers to easily control and optimize the production and metrology of their photoresists. LEYBOLD APS 1104 features a customizable control tool which enables automatic optimization of the mask making process to maximize production throughput and reduce cycle times. APS 1104 also offers a wide range of standard and custom imaging solutions including a full suite of quality control functions. With its high-resolution Zeiss microscope and Accurate Image Interleave (AIITM) asset, it can detect even the smallest defects in various types of photoresists. Additionally, the model also includes scanning electron microscope (SEM) for in-situ analysis of photoresist patterns. Furthermore, as part of LEYBOLD portfolio, LEYBOLD APS 1104 has excellent downstream capabilities such as RTP, charging, bonding and transfer. This allows customers to quickly and accurately move their photoresist patterns into their preferred substrates. In summary, APS 1104 is an advanced photoresist equipment designed for high precision mask making, inspection and metrology. It offers customers intuitive control of the entire photoresist process, with production control system, customizable imaging solutions, and excellent downstream capabilities, making it an ideal solution for high precision mask making.