Used LEYBOLD APS 1104 #293794881 for sale

A LEYBOLD APS 1104 is a photoresist equipment designed for the controlled and automated wet processing of semiconductor wafers within a production environment. APS 1104 system is an open-frame platform that employs a two-level design, allowing for maximum efficiency and safety in a production environment. It has four individual processing modules, each operating independently with dedicated controls for each module, allowing for ideal process control. The upper level of the unit consists of a conveyor, which transports wafers from the loading station to the four processing modules. The conveyor can be preset to move the wafers at predetermined speeds and intervals, allowing for repeatable and accurate process times. The lower level of the machine contains the processing solution tanks from which the process chambers of each module draw solution. The machine's four processing modules are used for the wet processing of semiconductor wafers. The first module performs the resist spinning process, applying photoresist material to the wafer surface. The second and third modules perform development and implantation respectively, while the final module performs the stripping process to remove the photoresist material. Each of these four modules uses a rotary drum composed of paddles to transport the wafers within a process chamber, suitable for processing both sides of the wafer simultaneously. The process drums contain heating elements and controls, allowing for accurate temperature settings and process control. LEYBOLD APS 1104 also provides a number of built-in safety features. The tool is designed to allow maximum accessibility and control from an operator position, allowing the entire asset to be monitored from the front panel. Alarm systems and warning lights can alert the operator of potential danger from overflowing tanks or of machines reaching their operating temperature limits. APS 1104 is an excellent photoresist model for automated semiconductor wet processing, providing maximum safety, accuracy, and efficiency for production environments.