Used LEYBOLD APS 1104 #9377873 for sale
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ID: 9377873
Vacuum deposition system
Chamber
Water manifold
Compressed air network
Control cabinets
Internal meissner trap
Planetary rotation drive
IR Heaters
Manuals
D65 Mechanical pump
WS501 Roots pump
ALCATEL / ADIXEN / PFEIFFER DIF501 Diffusion pump
Vacuum valves
POLYCOLD 1104-HC Pump with refrigerator
Combivac CM31 Vacuum gauge with gauge head
ITR100 Vacuum gauge with gauge head
THERMOVAC Gauge
Gas inlet system:
(3) Mass Flow Controllers (MFC) with valves
Tubing
Feedthroughs
APS Plasma source with power supplies
Deposition sources:
2- ESQ 212 E-Guns with rotation motor
Shutter assembly
HV10.3 E-Gun power supply
With programmable deflection controller
Remote control for E-gun sources
OMS 3000/R Thickness monitor
(3) Crystal sensors
(2) Dual sensors
With (2) QSM boards
LEYCOM IV
Automatic process and controller.
LEYBOLD APS 1104 Photoresist Equipment is a highly efficient, low cost and reliable tool for photoresist processing. Processing photoresist involves the application of a photosensitive film onto a substrate, and then exposing the film to light which produces a photoresist. This photoresist, once patterns have been etched into it, serves as a layer to block the diffusion of impurities into the substrate. APS 1104 Photoresist System utilizes a closed-loop design with multiple interchangeable wet processing modules, each tailored to specific photoresist processes. This enables users to create and replicate complex patterns and photoresist layers, including high resolution and repeatable patterns. Furthermore, the unit is designed for flexibility, with interchangeable modules and a broad range of configurations to meet various application requirements. LEYBOLD APS 1104 Photoresist Machine is highly efficient and cost-effective, providing superior image quality when used in a variety of application areas, such as printing and offset lithography, printed circuit boards, micromachining and surface mount technology. The tool provides a multi-zone design, a pumping station, and a process monitoring asset, which is designed to reduce the time spent in a given photolithography step. This model can also be configured to produce complex array patterns in a single run, increasing efficiency and eliminating potential errors that come with multi-step lithographic processes. Additionally, APS 1104 Photoresist Equipment is capable of controlling the thickness and patterning of a coating on the desired substrate. LEYBOLD APS 1104 Photoresist System also provides exceptional safety measures. The unit's built-in safety features are designed to protect personnel from hazardous chemicals and photoresist waste. It also safeguards the environment from any contamination or significant emissions. APS 1104 Photoresist Machine is certified its environmental compliance, making it a top choice for many industrial applications. In short, LEYBOLD APS 1104 Photoresist Tool is one of the most efficient and reliable photoresist processing systems available on the market. With its range of features and functionality, it is a great choice for any photolithographic processing requirement.
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