Used LEYBOLD CCS 250 #9236185 for sale
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ID: 9236185
Vintage: 2000
Coater
Controller racks:
Electron gun
Turbo pump
Ion source: Mark 1
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Computer
Includes:
Water-cooling system
FERROTEC POLYCOLD Cryo generator
Does not include computer monitor
Line voltage: 3x400 V, 3 Phase, 4 wires
Frequency: 50 Hz ± 2% / 60 Hz ± 2%
2000 vintage.
LEYBOLD CCS 250 is a state-of-the-art photoresist equipment used for creating protected encoded images and patterns on the surface of silicon wafers. CCS 250 offers full coverage to a maximum substrate size of 250 mm, allowing for the production of large, uniform patterns across multiple wafers. The system is equipped with three process modules, the developer, the prebake, and the postbake. The developer module is a wet-process developer, continuously washing away photoresist residues from the substrate to leave a clean, accurately patterned surface. The prebake module uses thermal treatment to increase the adhesion of the photoresist film to the substrate. Finally, the postbake module utilizes a short UV activation step to cure the photoresist coating on the wafer. The programming interface for LEYBOLD CCS 250 allows users to easily and accurately program operation settings and modes of operation including pattern widths, resolution, exposure times, and post-treatments. CCS 250's advanced design features a quadruple-junction light chamber with independent high-performance Lambertian emitters. This allows for precise selection and control of the light required for photoresist processing, ranging from communication to medical, optic, display, micro-assembly, precision parts, and flat panel display components. LEYBOLD CCS 250 features advanced process control features such as automatic self-diagnostics, measurement of accumulation of residues throughout the photoresist processing, and on-line monitoring of process parameters. This ensures that optimal performance is delivered in every run. CCS 250 also offers superior substrate protection, including a liquid photoresist temperature control unit and nitrogen plasma coverage machine for complete substrate protection. This ensures that the substrate surface is not damaged in the process. Finally, LEYBOLD CCS 250 offers unequaled process stability, productivity, and flexibility to meet customer needs. The machine features an expandable design allowing for numerous optional components to be added, such as color pattern recognition, memory scanning , etc. In summary, CCS 250 photoresist tool is an advanced, state-of-the-art platform for creating protected encoded images and patterns on the surface of silicon wafers. It offers superior substrate protection, increased process stability, and unprecedented flexibility to meet customer requirements and applications.
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