Used LEYBOLD CCS Pro #293770878 for sale
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ID: 293770878
Vintage: 2007
AR Coating chamber
Thin film consumable
HPE6 E-Gun
MK1 Ion source
Turbo pump
Crystal head
Small footprint chamber
D65B Mechanical pump
Turbomolecular high vacuum pump
2007 vintage.
LEYBOLD CCS Pro is a highly advanced photoresist equipment designed for coating and developing substrates in semiconductor manufacturing and other microelectronics applications. This system incorporates state-of-the-art technology to deliver precise and reliable performance in the production of high-quality semiconductor devices. At the heart of CCS Pro unit is its innovative coating and developing processes, which are crucial for the fabrication of semiconductor devices with intricate patterns and structures. The machine features a range of advanced components, including a spin coater, a hot plate, and a developer module, that work together seamlessly to ensure uniform and consistent coating and developing results. One of the key features of LEYBOLD CCS Pro tool is its spin coater, which is used to apply photoresist materials onto semiconductor substrates. The spin coater features a high-precision motor that allows for precise control of the spin speed and acceleration, ensuring that the photoresist is evenly distributed across the substrate surface. This uniform coating is essential for achieving high-resolution patterns and structures in the subsequent lithography steps. In addition to the spin coater, CCS Pro asset also includes a hot plate for post-coating bake processes. The hot plate is used to heat the coated substrates to a specific temperature, which helps to drive off solvents and improve the adhesion of the photoresist to the substrate. The hot plate in LEYBOLD CCS Pro model is equipped with precise temperature control capabilities, ensuring that the substrates are heated to the exact temperature required for optimal photoresist performance. After the substrates have been coated and baked, they are transferred to the developer module for the development process. The developer module in CCS Pro equipment uses a combination of chemical solutions and agitation to selectively remove the unexposed photoresist from the substrate, revealing the underlying pattern defined by the lithography mask. The developer module is designed to deliver high throughput and consistent developing results, allowing for efficient production of semiconductor devices with tight tolerances and high resolution. LEYBOLD CCS Pro system is equipped with advanced automation and control features to streamline the coating and developing processes. The unit includes a user-friendly interface that enables operators to set up and monitor process parameters with ease, reducing the risk of human error and ensuring reproducible results. Additionally, the machine can be integrated with external metrology tools for in-line process monitoring, allowing for real-time feedback and quality control. Overall, CCS Pro tool is a versatile and reliable photoresist asset that is ideal for semiconductor manufacturing and other microelectronics applications. With its advanced coating and developing processes, precise control capabilities, and user-friendly interface, this model offers exceptional performance and efficiency for the production of high-quality semiconductor devices with demanding requirements for pattern resolution and dimensional accuracy.
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