Used LEYBOLD HERAEUS 2450C #9152147 for sale
URL successfully copied!
Tap to zoom
ID: 9152147
Vintage: 1998
Coating machine
Speed: 700m/min
Material:
BOPP : 15-50µ
1998 vintage.
LEYBOLD HERAEUS 2450C photoresist equipment is an advanced etching and processing system that provides photolithographic patterning of advanced semiconductor devices. It is a compact, automated unit that utilizes a two-stage cluster configuration that enables double-sided mask patterning on 4" wafers that can be exposed with both contact and proximity alignments. 2450C utilizes industry-standard PCS and CMPprocessing tools to increase accuracy and reliability of processes. An industry-leading, precise-dosed mechanical wafer alignment machine ensures accurate registration of dark field overlays on both top and bottom wafer sides. A liquid crystal imaging monitor with 6-axis beam control delivers the highest resolution and enhanced contrast for demanding lithography jobs. LEYBOLD HERAEUS 2450C offers superior performance in many critical areas of photoresist processing. It features a temperature-controlled vacuum plate that maintains constant temperature and adhesion to the substrate. The tool is also equipped with automated exposure and developing processes that use advanced algorithms to improve yield. Its large, automated dispense heads precisely dispense the photoresist onto the wafer for uniform development and optimized process results. 2450C also features an integrated spin-coater, which enables precise control over the photoresist coating and removes resist debris post-coat. Its comprehensive software package is designed for programmability and can be used to store recipes and process parameters for more efficient processing. Moreover, LEYBOLD HERAEUS 2450C supports advanced photoresist processes such as double-layer patterning, multi-layer patterning, top and bottom layer patterning, resists strip, and reactive ion beam etching. It also supports advanced features such as electrical overstressing prevention and O2 plasma etching. The asset is designed for ultimate flexibility and can be upgraded to meet the needs of the most demanding photoresist processing applications. Leveraging its state-of-the-art feature set and performance, 2450C is a reliable and powerful photoresist model that effectively supports even the most complex fabrication processes. LEYBOLD HERAEUS 2450C is an essential asset to any electronics laboratory that needs precision photolithography for device fabrication.
There are no reviews yet