Used LEYBOLD HERAEUS ARES 1350 #9228483 for sale

LEYBOLD HERAEUS ARES 1350 is a high-end high-precision photoresist dry etch equipment designed for use in microelectronics production. This system utilizes a unique combination of advanced lithographic processes, including advanced photolithography, to fabricate incredibly tiny and complex patterns on wafers at resolutions down to 1-micron. This unit offers a variety of features, including a high-power laser illumination, which enables effective processing of UV-sensitive resist materials. The machine can also be used for direct-write patterning using a coated substrate. ARES 1350 also offers an industry-leading performance, resulting in better results and highest yield rates compared to other photoresist dry etch systems. It is highly reliable in providing a precise etching process, thanks to its advanced dynamic alignment tool, which maximizes alignment precision to the micro-meter level. LEYBOLD HERAEUS ARES 1350 Asset consists of two parts, a processing chamber and a laser chamber. The laser chamber is equipped with a high-performance laser source, focused output beam, and an advanced feature that enables efficient direct-write patterning. Additionally, the model is equipped with a robust automated electron beam fine-resolution control equipment (FEB-FERES) for higher precision, better control, and improved process stability. In addition, ARES 1350 system is also capable of adjustable pressure control and temperature control, which allows more flexibility and better control over the photoresist etching process. This unit is also designed with a high-performance air filtration machine, ensuring better job performance and cleanroom operation. LEYBOLD HERAEUS ARES 1350 offers superior performance and gives the highest yields for the microelectronics production. With its high precision, robust controls, and high-performance laser illumination, ARES 1350 offers a reliable photoresist etching process, thus ensuring shorter production times, higher yields, and cost savings.