Used LEYBOLD HERAEUS SYRUS-C 1350 #9228481 for sale

ID: 9228481
Vintage: 2007
Vacuum coating machine 2007 vintage.
LEYBOLD HERAEUS SYRUS-C 1350 is a photoresist process equipment intended for use in the photolithography area. This system is designed to provide photoresist properties to protect circuit patterns produced on semiconductor and wafer substrates. It is capable of processing up to 13-inch single-step coated wafers, as well as 8-inch 4emes and 12-inch 6emes wafer arrays. This unit is used to create photosensitive layers of photoresist on substrates for use in the lithographic or etching process. LEYBOLD HERAEUS SYRUS C1350 employs multi-stage coating techniques, allowing wafer to substrate ratio control for optimum process results. The process includes the application of a layer of photoresist over the substrate surface, baking the photoresist layer to a predetermined temperature, and applying further layers of photoresist. This machine also allows processing of both single-step coatings and quartered coatings with uniform coverage. Photoresist lines are printed onto a substrate using a CAD tool, and the height of the pattern to be etched is determined using a choice of semi-automated laser interferometers. A laser beam is then focused onto the wafer to expose the desired pattern. After exposure, the wafer is then subjected to a developer process to remove the non-exposed portions of the photoresist. SYRUS-C 1350 provides state-of-the-art features including adjustable dosage control for each exposure, localized pattern-specific exposure, and process automation capabilities. It is also capable of high resolution imaging down to 0.2 micrometers. The asset offers the user the option of using manual, semi-automatic or fully automated processes, allowing varying amounts of control and customization according to the application. Other advantages include a flexible needle design, which ensures uniform coverage of the substrate and a precise photoresist pattern. SYRUS C1350 provides high-quality and reliable resist processing, enabling users to manufacture complex structures with high precision. It is a valuable tool for fabricating high-resolution electronic circuits and components. The model offers a wide range of features and functions, which enables the manufacture of products for a variety of applications.
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