Used LEYBOLD HERAEUS SYRUSpro 1510 #293814636 for sale
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ID: 293814636
Vintage: 2004
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2004 vintage.
LEYBOLD HERAEUS SYRUSpro 1510 is a photoresist equipment designed to provide users with superior lithographic performance. It features a reliable and robust optical system, allowing users to achieve lithographic results far superior to conventional lithography systems. The unit features a fully automated lithographic process, allowing for precise and repeatable results over a wide range of substrates. It also features an integrated optical characterisation machine that provides users with accurate and sophisticated measurements of reflectivity and surface smoothness. The tool includes a resist sprayer, which sprays a resist solution onto the substrate with precision, producing even, uniform coverage over the entire surface. This is followed by a baking process, which removes any residual solvent from the resist thereby improving the imaging properties of the resist. The asset is also equipped with an exposure source, which provides uniform illumination of the substrate, enabling uniform development across the entire surface. Furthermore, the model is equipped with optics for imaging and inspection of the substrate. A high- resolution transilluminator is used to detect any irregularities or defects on the substrate which may degrade image quality. The equipment also includes an integrated optical characterisation system to analyse and compare image properties of different substrates. The unit features a high degree of mechanical and electrical stability. It allows for easy adjustment and regulation of parameters such as temperature, speed, pressure, and resist concentration. In addition, the machine also permits users to modify process conditions such as light intensity or exposure time to optimise process performance. The tool is easy to operate and intuitive to use, and its userfriendly interface makes it possible for users to quickly move from one process step to the next. LEYBOLD HERAEUS SYRUS PRO 1510 photoresist asset is a reliable and highly performing model, suitable for a wide range of lithographic applications.
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