Used LEYBOLD HERAEUS TCO #9259572 for sale

Manufacturer
LEYBOLD HERAEUS
Model
TCO
ID: 9259572
Coating system Aqua trap LEYBOLD AF 40-65 RUVAC WSU 501 LEYBOLD Vacuum LEYBOLD EV 63 EP.
LEYBOLD HERAEUS TCO is a photoresist system designed to optimise lithography processes in semiconductor production. Photoresists are a polymer material which, when exposed to light, are changed chemically and etched in the desired pattern required to transfer lithography onto a semiconductor surface. TCO incorporates both Positive and Negative Tone developers, a developer additive Ti-SAA and developer stabiliser, to ensure the best possible process performance. The Positive Tone developer, known as LEYBOLD HERAEUS TCO-PT, provides a high resolution and clean patterning outcomes, whilst also providing consistent overall etch performance and robust process latitude. It is available in both high and low viscosity formulations to suit specific customer requirements. Additionally, its fast stabilising action prevents build up of dissolved material and ensures optimal performance. The Negative Tone developer, known as TCO-NT, is designed to develop at a faster rate than the Positive Tone developer. This makes it more suitable for high throughput processes and it is also capable of producing high-resolution lithography. Furthermore, the Ti-SAA additive enables improved sidewalls and less corner rounding. It can also reduce the amount of undercut on the wafer surface, which results in cleaner patterning and greater yields. Finally, the developer stabiliser reduces the chance of polymer disruption due to spin speeds and helps maintain a consistent resist stripping rate. These features, combined with LEYBOLD HERAEUS TCO's other exceptional advantages, such as its excellent shelf life and ease of handling, make it the perfect choice for modern photoresist lithography processes in semiconductor production. Its ability to produce high-quality outputs in a fast and reliable manner makes TCO one of the most sought-after systems in its class.
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