Used LEYBOLD OPTICS GMBH CCS Pro #9329086 for sale

ID: 9329086
Vintage: 2013
Coating system 2013 vintage.
LEYBOLD OPTICS GMBH CCS Pro is a photoresist equipment for processing high-resolution applications. It has been developed for the fabrication of micro-devices such as microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). CCS Pro system offers an advanced lithographic technology which allows the fabrication of high precision thin films with a high resolution. The unit utilizes ultraviolet (UV, Holmium: Yttrium Aluminum Garnet) laser radiation to expose a highly focused image on the resist in order to create structures with just a few nanometers in size. LEYBOLD OPTICS GMBH CCS Pro unit is equipped with a self-aligning stage and a quartz red laser to perform exposure in a non-contact manner, ensuring no destabilization of the resist film. CCS Pro machine has several control functions which can be easily adjusted via a user-friendly interface. These include dose control and dose rate measurement, in-plane movement of the stage and pattern alignment capabilities. The machine is also equipped with an adjustable length field stop which allows the exposure to be restricted to a specified width, thereby further enhancing the resolution of the processed patterns. LEYBOLD OPTICS GMBH CCS Pro is also capable of variable repetition exposure and auto-focusing of the laser to help ensure precise and repeatable results. The unit has built-in safety measures to protect the operator from potential laser hazards. It has the capability of controlling the total radiance and is equipped with an anti-reflection exhaust tool which dissipates all the heat generated during the process to maintain the temperature of the resist and to preserve the device's working environment. Furthermore, the asset is also connected to a laser control model to monitor and regulate the laser intensity. To ensure a clean and uniform results, CCS Pro equipment has a built-in wafer cleaning station and spin-coating station which allows for easy and efficient preparation of the device's surfaces. Additionally, the machine can be further modified for use in combination with dry etching systems. Overall, LEYBOLD OPTICS GMBH CCS Pro offers a comprehensive solution for the fabrication of high-resolution micro and nano- devices. It offers great flexibility to accommodate varying goal requirements and has effective safety measures to protect its users.
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