Used LEYBOLD OPTICS Syrus TC III #9394826 for sale

LEYBOLD OPTICS Syrus TC III is a state-of-the-art photoresist equipment used in advanced integrated circuitry production. The system works by optical projection of a mask onto the wafer to produce a thin layer of photoresist. This layer is then used to protect the wafer surface during chemical processing such as etching. Syrus TC III is highly precise, allowing for resolutions down to 0.25 µm. It features a variable NA 0.5-0.7 variable substrates, as well as a 154 mm image circle for projection of larger masks. The unit is equipped with a 633 nm laser for fast exposing, as well as a dichromatic mirror to eliminate projection aberrations. The 270 nm vertical illumination sees an illumination intensity up to 3.8 mWatts/cm2. The entire machine is designed with flexibility and automation at its core. For example, the tool is compatible with a wide variety of wafer shapes and thicknesses, such as circular, rectangular, or even square. It also features an advanced process control asset, which allows for automated recipes for maximum repeatability and process consistency across multiple layers. It also features a multiple-zone overlapping exposure which reduces mask loading time and cost. LEYBOLD OPTICS Syrus TC III is one of the most advanced photoresist systems available. It offers increased production speed and precision while providing improved waste management and cost efficiency. This makes it the ideal choice for high-volume processing of photo-sensitive materials.