Used LEYBOLD Syrus 1510C #9395373 for sale
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ID: 9395373
Vintage: 2007
AR Coating system
WAU 2001 H Rotary pump
SV630 Booster pump
POLYCOLD PFC-1102HC Chiller
Hydronium box: LEYBOLD TP 250
(2) EB-Guns with 8-pockets crucible
Ion source: APS Source with TP250 Controller
Crystal system: Q242 Board with 6-crystal head auto-change
POLYCOLD Cooling capacity: 860 W
POLYCOLD Cooling temperature: -130°C
Short circuit: 100 kA
Rated power: 110 kVA
Temperature: 35°C
HV Power supply: Output 10 kV
E-Beam gun: HPE12/10
Air relative humidity: Maximum 65%
Heating voltage: 400 VAC
Evaporator boat:
Tungsten
Tantalum
Niobium
Control system:
IPC Controller: BECKHOFF C5102-0010
HMI: BECKHOFF CP6902-0001-0000
Independent IDE display card
Non-functional UPS
Power supply: (3) 400 VAC±10%, 3-Phase, 50 Hz
2007 vintage.
LEYBOLD Syrus 1510C is a photoresist equipment for photolithographical applications. The system includes a resist track, a post-development unit and a developer. It provides a repeatable and reliable platform for photoresist processing. Syrus 1510C has a simple and user-friendly design, allowing it to be quickly setup and operated. The unit has a dual track design which allows for two distinct processing jobs to be executed at the same time. Additionally, the machine has a microprocessor that can be programmed to aid in the repeatability of recipes and minimize setup time between users. The main components of LEYBOLD Syrus 1510C are the resist track and the post-development unit. The resist track contains perforated inner and outer walls that creates a consistent laminar flow through the tool. This creates a uniform diffusion of the photoresist material during the exposure process. The post-development unit incorporates a light source, which is used to create a photoresist film on the wafer. Syrus 1510C also includes a developer, which is used to remove the exposed photoresist material. This allows the substrates to be processed with the desired patterns. The developer is designed to be effective and consistent in removing the photoresist layer, while preserving the defined substrate topography. LEYBOLD Syrus 1510C is a highly versatile and reliable photolithography asset. It has a simple and user-friendly design combined with a dual-track design and automated controls, allowing users to quickly and efficiently process photoresist layers. Furthermore, it provides excellent repeatability which minimizes setup time between jobs. This model is ideal for providing quality and uniform photoresist ready substrates that are required for processing semiconductor devices.
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