Used MTS Marangoni #9165831 for sale
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ID: 9165831
Vintage: 2012
Dryer
N2 Flow -SCFH (SLPM):
Heated N2, High flow
Min: 636 (300)
Max: 1059 (500)
Typical: 850 (400)
Heated N2, Low flow
Min: 50 (23.5)
Max: 75 (35.4)
Typical: 60 (28.3)
IPA Bubbler
Min: 30 (14.1)
Max: 60 (28.3)
Typical: 50 (23.5)
IPA Purge
Min: 30 (14.1)
Max: 60 (28.3)
Typical: 50 (23.5)
Static purge
Min: 30 (14.1)
Max: 60 (28.3)
Typical: 50 (23.5)
Chassis purge
Min: 10 (4.7)
Max: 20 (9.4)
Typical: <15 (7.1)
N2 Temperature:
Heater core: Ambient to 200°C
Heater over-temp:
External surface (Snap switch): 162°C
Heater core: 250°C
Gas temp:
Programmable
Ambient to 160°C
130°C typical
DI Water flow:
During process: 10-15 GPM (38-57 LPM)
Idle (Trickle flow): 1.5 GPH (.09 LPM)
Process capacity (Wafers per run):
Dual tanks: (50) 6" wafers-two cassettes of 25 wafers
Single tank: (25) 12" Wafers
Down and move out time: 6 Hours
Currently installed
2012 vintage.
MTS Marangoni is a state-of-the-art photoresist equipment designed to ensure a high degree of accuracy and efficiency for fabrication processes that require photoresist coating. The system utilizes a patented process of ultra-precise liquid coating, which makes it possible to apply the photoresist efficiently and reliably to substrates with minimal waste and loss. This photoresist unit provides users with a range of customization options, allowing them to tailor the coating to their specific needs, resulting in photoresist films with superior mechanical properties and high optical clarity. Marangoni photoresist is a UV-sensitive polymer solution that is dispensed using a specially designed robotic machine. This coating is applied to most materials with high accuracy and repeatability, which allows the user to produce large high-precision parts with minimized waste. MTS Marangoni tool also offers a range of thickness control to help manage the film's thickness for optimal optical properties. The photoresist is dispensed using a series of precision nozzles that atomize the solution into tiny droplets, ensuring uniform coverage and maximum performance. This droplet deposition process ensures that the photoresist is uniformly applied to the substrate surface without any voids or non-conformities. Marangoni asset also offers a number of flexibility adjustments, including the ability to control the number of layers and the width of the track. This ensures that users can apply multiple photoresist layers accurately and consistently. MTS Marangoni photoresist model is designed to make photoresist coating processes easier and more efficient. By eliminating wasted time and product, Marangoni equipment enables users to produce superior photoresist films with a minimum of effort and cost. With its simple yet robust design, MTS Marangoni photoresist system provides its users with precision, reliability, and an efficient workflow.
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