Used NEXX SYSTEMS Stratus 300 #9278180 for sale

NEXX SYSTEMS Stratus 300 is a world-class photoresist equipment, designed to meet the stringent requirements of the most demanding photoresist processes. It offers high throughput, accurate, repeatable and reproducible processing, in a cost-effective manner. Stratus 300 is suitable for all standard photoresist processes including multi-layer metallization, thin-film formation and dry etching. It offers excellent resist profile uniformity with minimal contamination and is designed for fast and precise timing of multiple exposure steps. Its high throughput system produces consistent results, with a maximum process speed of up to 200 layers/min. NEXX SYSTEMS Stratus 300 incorporates several advanced features. Its multi-stage pre-baking module provides a highly efficient pre-cleaning process for improved deposition and etching. The pre-baking module prevents resist cracking in high temperature processes and ensures uniform resist thinning during photoresist crystallization. Stratus 300 features a unique control unit that simplifies the operation of the machine and provides complete flexibility of exposure parameters. The Control Console includes multiple exposure cycles, programmable logic functions, PID feedback control and dampers, as well as a database for recipe management. NEXX SYSTEMS Stratus 300 includes a host of advanced features, including a high-resolution micro-aperture alignment tool, nano-spot uniformity and spot-matching algorithms, as well as an automated substrate-gesture tracking asset for improved uniformity and repeatability. Stratus 300 is designed for low-cost, reliable processing of high-value photoresist products. Its flexible front-end materials model make the equipment highly compatible with multiple chemistries and substrates. NEXX SYSTEMS Stratus 300 minimizes contamination and is suit for single- and multi-layer processes, allowing for faster throughput and reduced time-to-market.