Used NOVELLUS / LAM Saber XT #9224442 for sale
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ID: 9224442
Wafer Size: 8"
Cu Plating system, 8"
System controller
Module controller
Cassette handler controller
Main system:
Wafer cassette: 25 wafer
Mini-environment: SYNETICS
Chase computer / monitor: Desktop PC/CRT
Exhaust kit: TOP Mount
Drain kit: Backside
Cassette handler module:
Load port: Static nests, (4) stations
Wafer aligner type: Mechanical center finder
Robot type: AQR7 BROOKS
End effector: SST x/ Vacuum port
Mapping type: Thru-beam
Wafer release: With puff
Plating cell configuration:
Cell 1, cell 2 and cell 3:
Clamshell type: Standard
Clamshell cup type: PPS
Clamshell cylinder: Pressure-vacuum cylinder
ANODE Type: Standard
(2) TI Cables
SAC
Clamshell lift: IAI
ACR
Active top hat
Plating power supply: AE Pulse power supply
Post plating cell configuration:
Cell 1, cell 2 and cell 3:
Chuck type: PPS
Wafer present sensor mount: Standard
EBR
Bath module:
Totalizer #1 & #2 manufacture: FLORITE
Dosing pump 1,2 &3: MS1602-024
Recirculation pump: IWAKI WALCHEM CMD-101
CDM Level sensor type: KEYENCE
Heat exchanger: NESLAB HX-75
Auxiliary equipment:
Chemical monitoring system (CMS): ECI QLC-7000
Chemical delivery system (CDS): OEM
Mini delivery system (MDS): OEM
DI Water delivery system: OEM
Input voltage: 208 VAC, 50/60 Hz, 100 A.
NOVELLUS / LAM Saber XT is a photoresist equipment designed for use in a variety of demanding industrial applications. The system utilizes a patented, single-use, and single-step process to provide user-friendly and cost-effective precision imaging. The unit's advanced photoresist technology is one-of-a-kind, and is designed to deliver both high throughput and unmatched precision when it comes to imaging. It is extremely adaptable and can be rapidly set up for different jobs, while still operating at optimal performance level. The technology also ensures the highest levels of resolution, accuracy, and repeatability in photoresist imaging. LAM Saber XT is equipped with a specialized high-powered optical imaging machine, which utilizes an advanced laser-based approach. The signature laser-based approach is what enables the tool to maintain incredibly high levels of precision. This asset is also designed to facilitate productivity-enhancing features such as an intuitive and programmable data logging model, as well as real-time performance monitoring for supervisory control. The equipment's hardware is backed by an intuitive software suite, which is designed to provide users with the utmost in both flexibility and ease-of-use. Loaded with programmable functions, the software can be easily tailored to fit the needs of any particular task. It is the perfect choice for users who demand a straightforward and reliable photoresist imaging system. Finally, NOVELLUS Saber XT is designed with tremendous durability and flexible capability. Its heavy-duty components are housed in an enclosed unit to maximize longevity and minimize potential maintenance. Moreover, Saber XT can be safely operated in a variety of environmental conditions, including extreme temperatures and radiation, making it ideal for a breadth of industrial applications. In conclusion, NOVELLUS / LAM Saber XT is an industry-leading photoresist machine, uniquely designed to deliver precision imaging for a variety of demanding industrial tasks. Its advanced laser-based imaging tool, intuitive software, and durable construction make it the perfect choice for anyone looking for reliable and dependable performance.
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