Used OPTORUN OTFC-1300 #9215115 for sale
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ID: 9215115
Vintage: 2006
Optical thin film coater
Control: PLC
PC
SUS304 Vacuum chamber
Substrate dome size: D1130 mm
Pumping system:
Mechanical pump 4,000L /min + Mechanical booster pump
(2) Diffusion pumps, 22”
INFICON VGC023 Vacuum gage
Cold trap: POLYCOLD PFC670HC for meissner trap coil
EB Sources:
L: Loop hearth
R: 24-Points hearth
JEOL EB Source 180° deflection system
(2) JEBG-1C2UCHC
Power supply:
JEOL EB Source: JST-10F
Shutters:
(2) EB Sources
Ion source
Ion source:
OPTORUN OIS ONE RF Ion source system: 170 mm Diameter
Substrate fixture:
Variable speed dome: 10~50 RPM
Optical film thickness control system:
OPTORUN HOM2-R-VIS350A
Wavelength range: 350 nm to 1100 nm
Reflection
Crystal film thickness monitor:
INFICON XTC-2
6-Points rotary crystal sensor
Process gasses controller:
Controller: INFICON VCC500
Control valve: INFICON VDM005-X
2006 vintage.
OPTORUN OTFC-1300 is a photoresist equipment designed for cost-effective, high-precision production of photoresists and other thin film coating materials. This system offers a variety of configuration options allowing users to tailor the unit to their individual application requirements. It features an advanced coating head design that is capable of delivering a uniform thin film coating onto any substrate with excellent precision and repeatability. OPTORUN 1300 includes an integrated pressure-controlled vacuum pump, which ensures a well-controlled coating process and also minimize evaporation of the photoresist material. This machine also features dual-stage heaters for efficient heating and cooling of the materials. The tool has a built-in timer which allows precise control over application time, enabling users to easily adjust the coating thickness. The photoresist process on OTFC 1300 is fully automated, providing users with a reliable and repeatable production process. The asset also features a number of integrated safety features, including overcurrent protection and an emergency shutdown model. Additionally, a sophisticated visioning equipment allows users to inspect the finished photoresist layer before curing. 1300 utilizes an advanced in-line robotics system, allowing for greater flexibility and faster turnaround times. This unit also features an advanced touch-screen interface, enabling users to quickly select parameters such as speed, pressure, and rate of material delivery. Additionally, this machine has a networked connection, allowing remote control and monitoring of the photoresist process from a computer or smart device. OTFC-1300 is designed to be reliable and easy to use, making it an ideal solution for mass production of photoresist materials. The tool's automated process and programmable safety features are designed to help ensure product consistency and accuracy. This asset is also well suited for prototyping and low-volume production applications, due to its precise control, quick setup, and easy maintenance requirements.
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