Used OPTORUN OWLS-1800DV2H #293753765 for sale
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ID: 293753765
Optical sputter coater system
Base plate fixture size: Ф 375 mm x T 5 mm
Base plate rotating speed: 10~100 rpm
Target size: Ф 142 x H 630 Ti
(2) ICP Reaction sources: RF power supply 5 kW
Transmission system: Double-arm vacuum mechanical arm
Cathode power supply:
(2) Bipolar MF power supplies: 24 kW
(2) High pulse power supplies: 20 kW.
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