Used PHILIPS / FEI Magellan 400L #293597808 for sale
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ID: 293597808
Vintage: 2012
Field Emission Scanning Electron Microscope (FE-SEM)
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Vibration isolation table
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(10) ACC Parts
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Work desk
5-Axis high precision stage, 4"
In-lens / Out lens detector
VCD Detector
NORAN EDS System (UltraDry SDD Detector)
Beam deceleration: 50 V - 30 kV
ELSTAR Electron gun: 0.8 nm at 15 kV / 0.9 nm at 1 kV
2012 vintage.
PHILIPS / FEI Magellan 400L is a photoresist equipment designed specifically for high-resolution patterning of microelectronic devices. It is an advanced, user-friendly system that is capable of producing high-fidelity patterns on a variety of substrates. The unit utilizes a 4K ultra high resolution camera that is precisely capable of patterning electron-beam resists on surfaces such as wafer and mask. The electron beam photographs individual pixel points and then integrates them out to a defined size and shape. A precise stage-based projection aligns exposures to ensure that the desired coverage area is accurately achieved. FEI Magellan 400L machine is integrated with a series of advanced hardware and software features, such as an automatic calibration tool that can determine the optimum beam current, exposure time, and resolution settings for the best possible pattern resolution. It is also equipped with a sophisticated software asset for patterning, UV lithography, and electron beam lithography. The model's control panel provides easy access to a variety of parameters, including beam velocity, focusing range, acceleration and deceleration, focusing position, forward and reverse tilt, and vector linearity. Its high resolution also makes it suitable for reverse processes such as lift-off and PR coat. The equipment also contains a number of safety features that include an adjustable safety beam and emergency stop features. Its robust and reliable structure makes it possible for the user to hold it stationary and maintain a stable platform. The system's vibration stability, resolution, low particle contamination, and shadow-free patterning makes it an attractive choice for those seeking a reliable and precision resist unit.
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