Used SANYU SC-701C #201213 for sale
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ID: 201213
Sputtering system with cryogenic stage
Manufactured for large-chambered JEOL 5000 or 6000-series microscopes
Sputter coat and freeze specimens immediately before load-lock
Carbon holder Cartridge type
Number of coatings One to nineteen
Coating time 0.3sec/1time
Carbon 5mm dia.Five pieces made by SANYU ELECTRON provided
Chamber size 160mm dia.x160mm in depth
Electrodes One pair
Current MAX. 70A, 12V
Input power 100V, 15A, 50Hz/60Hz
Evacuation system Rotary pump. 100l/min
Vacuum degree 10-3 Torr
Sub-systems:
Bio-Rad Crytrans Controller
Bio-Rad E7400 Sputtering or Evaporation Module
Maxtek Thickness Monitor
Hexland Temperature Control
Dual pumped vacuum system.
SANYU SC-701C is a high precision photoresist equipment designed for a wide range of applications, from UV to x-ray lithography. Photoresist is an insulating material used to etch and transfer circuit patterns onto semiconductor wafers. It has a light-sensitive coating that converts light into a patterned chemical reaction which can create a desired pattern on the substrate. SC-701C is designed to provide users with outstanding performance and versatility in a compact package. It has a built-in high-resolution projector and boarder enhancement system for image accuracy. The dual-track rotation unit offers uniform exposure, with a 5-degree tilt for greater control over exposure. The machine also features a fully computerized control panel, automatic focus and adjustable exposure time. SANYU SC-701C is capable of producing extremely precise patterns, with picture cell resolution up to 1 µm. It is compatible with a wide range of photoresist materials and etching solutions, and can be used to etch semi-conductive materials such as silicon and gallium arsenide. The tool is also certified to use the latest resists from major manufacturers. SC-701C is easy to operate and maintain, making it perfect for versatile photomasking needs. Its high resolution projectors, automatic focus and adjustable exposure time provide you with the ability to quickly and accurately create photomasks for SEMI and JEDEC standards. It is compatible with conventional PMMA resists and both positive and negative processes which makes it suitable for a wide range of applications in fabrication processes such as etching and transfer. Its compact design also makes it easy to use with small and tight spaces or high-input production operations. SANYU SC-701C is an ideal photoresist asset for use in a wide range of applications, offering excellent performance, versatility and precision. Its advanced features provide you with the ability to easily create accurate patterns, as well as controlled expose times and projectors. This model will make a valuable addition to any production floor as it provides an ideal solution to complex and exacting photomasking needs.
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