Used SCL CD 200A #9352010 for sale
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ID: 9352010
Vintage: 2002
Hard coater
(3) Cleaning tanks
(2) Varnish tanks
(2) Ovens
Color touch screen
Oven heaters with displays
Etching motor
Filters housing
DI water system with pump
Pipes varnish
Pubber
Air system
LAUDA Chiller
2002 vintage.
SCL CD 200A is a universal photoresist equipment designed for photolithography processes in the semiconductor industry. It consists of a liquid photoresist, a negative mask, a light source and a process chamber. The photoresist is a photosensitive material which is applied to a wafer and exposed to a light source with a negative mask. The mask is composed of a pattern of clear and opaque areas which allow a controlled amount of light through to the photoresist. When the photoresist is exposed to light it undergoes a chemical change in which it is either cross-linked or degraded depending on the wavelength of the light. This allows for highly precise patterning of features onto the wafer. SCL CD 200 A system features an advanced process chamber for controlling the photolithography process. It can control various parameters such as temperature, pressure, humidity, and atmosphere. This allows for a highly controlled photolithography process which delivers accurate and repeatable results. Additionally, the unit can be used for both dry and wet processing. The machine takes advantage of a liquid immersion technique in wet processing, enabling greater resolution and improved process control. The tool is capable of handling multiple substrates including photomasks, topoglass, quartz, and glass-on-quartz. It is designed to run continuous single and dual-track production runs. It uses a proprietary uniform light source to ensure consistent exposure across the wafer. The asset can be used for both positive and negative photoresists and can handle a wide range of wavelenghts from deep UV to infrared. CD 200A model provides a high level of process and performance consistency. It offers improved resolution and enhanced process control. It is a fully automated equipment and can be used for high-volume production processes. It is easy to use and maintain and is ideal for high-accuracy, cost-effective photolithography processes.
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