Used SEMES EKPS-01 #9259252 for sale

SEMES EKPS-01 is a high-tech photoresist equipment designed for a wide range of lithographic applications. The system comprises of a number of components that work in tandem to provide excellent performance and precision. EKPS-01 unit includes a vacuum best table (VBT) with a closed-loop height control machine that ensures precise and accurate alignment during processing. The VBT is driven by a linear axis twomotor control tool to allow x-y-z movements, which facilitate alignment of substrates and increase processing accuracy. The photoresist dispensing station offers automated dispensing of the photoresist solution, with the ability to produce a thin, uniform coating on substrates of varying sizes and geometries. The e-beam exposed work station is capable of creating patterns over large areas with rapid exposure speeds and high-quality results. A direct isotropic etch station is used for chemical dry etch processing of samples, and provides flexible process parameters for advanced fabrication needs. Finally, a chemical solvents station removes unwanted residues and prepares the samples for further operations. SEMES EKPS-01 is an ideal choice for high-precision lithography, offering maximum process accuracy and efficiency.