Used SEMITOOL 270F #151770 for sale

SEMITOOL 270F
Manufacturer
SEMITOOL
Model
270F
ID: 151770
Wafer Size: Up to 6"
Spin rinse dryer, up to 6".
SEMITOOL 270F is a photoresist equipment primarily used in semiconductor fabrication. This tool has a self-contained resist processing system with a convection bake module and a dry strip module. The conveyor module in 270F seamlessly moves wafers from step to step and reduces the need for manual handling of the wafers. This module utilises a security clamping unit which eliminates potential damage to the wafer handler interface tools. The bake module consists of two high-temperature chambers, an over-temperature detector and conveyer belt. The temperature of the upper and lower ovens may be independently set and programmed for optimal processing and the integrated over-temperature detector ensures security and avoids damage. The Dry Strip Module of SEMITOOL 270F is designed with a single low-profile cassette capable of accommodating up to 19 wafers at once. This machine provides high speed, uniform and consistent strip quality with a minimal exposure time to the harsh chemical environment. The strip module also features a safety strip gas and Chemical Detection Tool, which safeguards personnel and equipment from undue harm. 270F asset is housed in a cleanroom-compatible enclosure equipped with a three-position door switch, programmable exhaust fan, and Batch Mate data acquisition. This model allows for full flexible, offline programming and evaluation of process recipes and can be integrated into the customer's existing automation environment. In addition, SEMITOOL 270F equipment has built-in services for calibration, maintenance and security. Overall, 270F is an advanced photoresist system designed to provide superior photoresist and dry strip processing for the fabrication of semiconductors. This unit allows for significant increases in yield, reliability, and cost savings through improved control of the process and improved process performance.
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