Used SEMITOOL 270S #151767 for sale

SEMITOOL 270S
Manufacturer
SEMITOOL
Model
270S
ID: 151767
Wafer Size: Up to 6"
Spin rinse dryer, up to 6".
SEMITOOL 270S is a sophisticated automated photoresist spray coater specifically designed for ultra-high precision photoresist coating applications. It features a modular design and offers maximum flexibility, allowing it to be configured to suit different customer needs. SEMITOOL 270-S is designed to coat large areas with a uniform, repeatable film thickness and can accommodate up to four different photoresist types, simultaneously or in sequence. The equipment includes an integrated sensors and control systems, making it highly reliable in operation. 270S photoresist spray coater is equipped with a computer-controlled, multi-zone process chamber which can be adjusted to precisely control different parameters during the application process. The chamber has a computer-controlled adjustable volume chamber with a dynamic pressure sensor, ensuring uniform thickness. The volume chamber also has an auto-refill system to replenish the chemical tank automatically and to maintain uniform resist concentration in the loading chamber over time. 270-S also includes a nitrogen sweep unit for cleaning the chamber between coating batches. SEMITOOL 270S photoresist spray machine is designed with an advanced servo-controlled spray gun, allowing for precise and repeatable application of the photoresist material. The nozzle is designed to apply a uniform film with a minimum of oxidation and defect formation. The nozzle has a rotating spinner assembly mounted in a variable-width concentric ring, which can be adjusted to produce uniform coatings with varying line widths. Additionally, the tool utilizes a multi-nozzle configuration, allowing for simultaneous processing of multiple substrates. SEMITOOL 270-S photoresist spray coater features a user-friendly, graphical interface for flexible and intuitive programming. This allows for easy control over the coater's parameters, set-up and operation. Furthermore, the asset utilizes step-and-repeat technology to ensure consistent patterns of coating across the substrate, making it highly efficient. Finally, 270S is equipped with a maintenance mode to minimize downtime and ensure proper operation and continual functionality.
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