Used SEMITOOL 270S #178056 for sale
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ID: 178056
Table-top Spin Rinse Dryer (SRD)
Specifications:
101 Controller, Digital
Polypropylene cabinet
Up to 6" process capability
Brushless motor
Teflon DI and N2 lines
Color coded pneumatic tubing
Electropolished Bowls
Labyrinth Seal design
110V
QD rotor design - No rotors are included
DI resistivity monitor option is included
Anti Static module option is included
DI recirculation option is included
Bowl opening is 11.5" wide
Bolt pattern on the rotor is spaced out at 7.5" in diameter.
SEMITOOL 270S Photoresist Equipment is a high-performance wafer processing tool designed to meet the latest market demand for semiconductor lithography processing. This tool is designed for processing up to 150 mm wafers on a variety of photomasks, substrates and coatings, and is the perfect choice for lithographic processes such as etching, ion implantation, implantation and other advanced processes. SEMITOOL 270-S features a 7-axis robotic positioning system and a 4-axis stop motion unit, both of which are connected with a controller to ensure an optimal process. The entire machine is integrated with a motion control computer and an Operator Interface. The computer allows the operator to control the machine remotely, by manipulating the various robotic motors. The Operator Interface, on the other hand, enables the operator to monitor the progress of the process as well as adjust specific parameters. In terms of wafer processing, 270S is capable of efficiently administering light exposure, spin and spray coating, pre-bake and post-Bake, backside cleaning and coating, as well as post-exposure bake operations. The tool can perform at speeds of up to 180 watts per second and can be programmed accordingly. It also features an advanced, automated correction asset to further enhance process control. In terms of safety and security, 270-S delivers high levels of control and automation through a number of key features. The model comes with an advanced Security Protocol, which prevents unauthorized movement or modification of the machine. Additionally, the robotic motors are equipped with safety interlocks and the entire equipment is designed to meet the most stringent fire safety requirements. In summary, SEMITOOL 270S Photoresist System is a reliable, powerful and efficient wafer processing tool designed to meet the latest requirements of semiconductor lithography processing. It offers high levels of safety, accuracy and control, and the advanced computer and operator interface makes remote programming and monitoring extremely easy.
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