Used SEMITOOL 270S #293590455 for sale
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SEMITOOL 270S is a photoresist equipment designed for optimal use in high-volume semiconductor fabrication. Utilizes an innovative spinner design with a pre-manufactured ceramic chuck and a custom-machined aluminum quill for optimum chemical resistance, temperature uniformity and particle control. SEMITOOL 270-S offers multiple cassette options for a range of photoresist processing needs, with a standard 4 x 5" cassette design for large coatings, a standard E-max cassette for smaller coatings, and an advanced 10 cassette for high-precision ultra-high throughput. Internal and external wafer-handling accessories are available for increased capability and convenience. 270S has an advanced chemical control system, allowing users to precisely control resist concentration, temperature, time, spin and rinse speeds, and other parameters. A unique wafer lift mechanism is standard, allowing users to raise and lower the entire wafer into position as needed. The spin and/or rinse speeds can be programmed on the panel, or the direct-drive motor can be used to deliver an independent, uniform spin rate. 270-S is equipped with multiple safety features including press-to-spin and spin-on-demand interlock switches, wash tank and spin tank overflow sensors, and an automatic shutoff unit should the reservoir exceed a certain level. An on-board nitrogen machine also helps reduce the risk of oxidation, and a closed loop temperature control tool eliminates localized hot spots and surface temperature variations. SEMITOOL has also included advanced diagnostics systems, which monitor important temperatures, speeds, and other operative variables. SEMITOOL 270S photoresist asset a reliable and efficient tool for modern semiconductor fabrication. With its advanced safety and chemical control systems, exacting spin and rinse functions, and on-board monitoring capabilities, SEMITOOL 270-S provides the highest quality photoresist processing for your demanding production needs.
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