Used SEMITOOL 4300S #293608837 for sale

SEMITOOL 4300S
Manufacturer
SEMITOOL
Model
4300S
ID: 293608837
Spin Rinse Dryer (SRD) Chamber, 8" 102 Digital controller N2 seal non-contact labyrinth Electro polished bowl Brushless motor with LC-4 controller Static eliminator assembly Resistivity monitor and probe DI Water recirculation Bowl heater blankets N2 Cartridge heater Single bolt rotor 240 Volt step down transformers Particle counts < 25 at .3 micron Single stack cabinet.
SEMITOOL 4300S is a high-end photoresist equipment designed for advanced microelectronic manufacturing applications. It is a fully automated coating and development system that can handle a wide range of wafer sizes and processes. The unit also includes automatic film thickness control for both positive and negative photoresists. It is loaded with advanced features to optimize process control, tool uptime and yields. SEMITOOL 4300 S machine offers precise control of the film thickness on any substrate surface including glass, silicon, and quartz. Its advanced optical interferometer provides the absolute film thickness at the wafer level and performs precise thickness measurements within minutes. This tool also integrates a reverse scan mode, a multi-channel humidifier and a fiber optic-based measurement technology to ensure repeatability, accuracy and reproducibility. 4300S comes with an automatic 18-step 200mm programmable wafer cassette which ensures that the wafers are loaded, cleaned and exposed in a suitable manner. It is equipped with a chemically-resistant sprayer with a patented nozzle technology which allows for precise and uniform coating parameters. The asset also includes a proprietary four-roll squeegee module to accurately control chamber pressure and flow rate for ensuring uniform film thickness and high yields. 4300 S is also equipped with advanced process control software which includes a hardware monitor for monitoring model parameters, a recipe editor for customizing and changing process parameters and a production manager for tracking production history and statistics. The integrated automatic defect detection equipment reduces contamination by monitoring the photoresist film and substrate surface for anomalies not visible to the eye. Finally, SEMITOOL 4300S comes with an ergonomic design which allows for easy accessibility and simplified maintenance. Its features and functionalities ensure efficient processing and reliable production while protecting against unintentional contamination and minimising cost. The automated system is proven to yield high repeatability, low cross contamination, good photolithographic performance, and improved productivity in the assembly of microelectronic products.
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