Used SEMITOOL 460 series #84151 for sale

SEMITOOL 460 series
Manufacturer
SEMITOOL
Model
460 series
ID: 84151
rinser/dryers.
SEMITOOL 460 series is a photoresist equipment that is equipped with advanced wafer track technology and proprietary software for automated front-end processing. The system is designed for tight process control and features high-precision stages and single-wafer RF delivery. 460 series photoresist systems are mainly used for processes such as photolithography, thermal process and slice transfer. The unit includes a fully-configurable robot that enables users to customize wafer orientations and substrate sizes, enabling quick and easy setup. The machine also has built-in error detection and diagnostic capabilities that allow for real-time control of processes. Furthermore, the tool is capable of tracking the progress of a process and displaying performance data via the user-interface. The asset has a unique ultra-precise non-contact dispense technology which allows for highest-accuracy delivery of modern photoresists and other virtually any feature size or shape. The model is also equipped with high-precision indexing stages which are designed to reduce positional errors. This helps ensure tight process control. SEMITOOL 460 photoresist equipment also has several state-of-the-art options, such as a motorized chuck, quartz turbo heaters, turbine blower, particle scanner, and plasma assist. The system also features advanced protection systems to ensure safety of sensitive substrates. The unit is designed to provide a reliable and accurate photoresist solution to users. SEMITOOL 460 series is a sophisticated photoresist solution that enables users to achieve high yields and increased production. The machine is designed for reliable and accurate delivery of photoresists, enabling users to optimise their processes for minimal variation and tight control. Furthermore, the tool is equipped with several advanced features for high-precision performance and maximum safety.
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