Used SEMITOOL 460S #9194050 for sale
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ID: 9194050
Wafer Size: 5"
Spin rinse dryer, 5"
Controller compatability: PCS-101, PCS-102
DI Water recirculator capable
Labyrnith motor seal
Motor type: Brushless
N2 Heater capable
Rotor type: Quick disconnect
Static eliminator capable
Substrate size: 125 mm
Resistivity monitor
System configuration: Roll around single bowl.
SEMITOOL 460S Photoresist Equipment is a high-tech piece of equipment designed to allow users to deposit a wide range of resists or materials on a substrate in order to create a layer with specific optical characteristics. 460S is a batch processing system, which means that multiple substrates can be loaded into the unit and processed in a single operation. The batch size is limited to a maximum of 24 substrates, but the minimum size is one. SEMITOOL 460S machine is designed to accept a broad range of resist materials, including photopolymersizable liquid resists, e-beam resists, and coating resists. The flexibility of the tool reduces machine set up time, and permits a variety of process recipes to be employed, allowing users to match the individual needs of their application. 460S utilizes advanced thermal control technology in order to ensure a uniform temperature throughout the structure and its processes. The temperature is regulated through a closed-loop feedback process, ensuring that the temperature is maintained accurately during the program's run. Additionally, the closed-loop feedback control also allows the temperature to be adjusted or adjusted over time, enabling users to further refine their process parameters. SEMITOOL 460S uses precision automated robotics and a moveable platform to position substrates. The platform features a 7-axis design with a programmable positioner, allowing the substrates to be precisely oriented. In addition, the platform is designed to achieve high-speed positioning and is equipped with a vacuum asset to avoid any potential collisions during the process. 460S model is equipped with a highly sensitive optical equipment designed to check the thickness of the resist layer during the process. The system utilizes an infrared unit that allows users to measure layer thickness quickly and accurately, reducing time and effort. SEMITOOL 460S Photoresist Machine is an ideal solution for users who require precision coatings over large batches of substrates. This tool offers great flexibility while still affording the user the accuracy and control needed to achieve desired end results. 460S is the best solution for industrial and research applications that require high-precision coatings of resists and other materials.
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