Used SEMITOOL 460S #9229852 for sale

SEMITOOL 460S Photoresist Equipment is an automated tool designed for wet processing applications in the semiconductor manufacturing industry. It is capable of handling a variety of photoresist materials, including positive and negative formulation resists, and photodefinable polymers. The unit features a ProFlex™ II Liquid Module, which provides a single-tank immersion lithography solution for wafer processing. It also employs advanced safety features and process control technology to ensure a reliable and repeatable process. 460S is equipped with a high-performance pattern generator that is capable of generating varied photoresist recipes and maintaining them in memory for future use. Additionally, it is capable of performing multiple simultaneous processes with up to four different wafer types, thanks to its four-washer Dual-Lane Technology. This helps facilitate a highly automated process, allowing for faster throughput and improved wafer yields. SEMITOOL 460S system boasts two separate process chambers, the Develop Chamber and the Strip Chamber. Both chambers employ fully temperature-controlled, recirculating baths that ensure the photoresist resists exposure to light and maintains a consistent temperature level throughout the process. Additionally, the chamber design prevents cross-contamination between the two chambers by removing the potential for washed wafers splashing solution over partition walls. 460S also includes a number of optional accessories, such as a Shadow Mask Module, which allows for rapid, precise placement of photoresist patterns onto wafers, and a Basket Transfer Station, which permits isolated pumping of cassettes and floors. The unit also includes advanced process control software to monitor and record conditions throughout the entire process. Finally, the unit possesses a variety of power levels to ensure optimal wet processing of all photoresist materials. In summary, SEMITOOL 460S Photoresist Machine is an advanced tool designed to provide automated wet processing of a variety of positive and negative photoresist materials. It features advanced process control software, recirculating baths for consistent temperatures, and various additional features and accessories to ensure a reliable and repeatable process.